Elemental Mapping - Characteristic x-ray intensity is measured relative to lateral position on the sample. Variations in x-ray intensity at any characteristic energy value indicate the relative concentration for the applicable element across the surface. One or more maps are recorded simultaneously using image brightness intensity as a function of the local relative concentration of the element(s) present. About 1 µm lateral resolution is possible.
Line Profile Analysis - The SEM electron beam is scanned along a preselected line across the sample while x-rays are detected for discrete positions along the line. Analysis of the x-ray energy spectrum at each position provides plots of the relative elemental concentration for each element versus position along the line.
TYPICAL APPLICATIONS
Foreign material analysis
Corrosion evaluation
Coating composition analysis
Rapid material alloy identification
Small component material analysis
Phase identification and distributionSAMPLE REQUIREMENTS
Samples up to 8 in. (200 mm) in diameter can be readily analyzed in the SEM. Larger samples, up to approximately 12 in. (300 mm) in diameter, can be loaded with limited stage movement. A maximum sample height of approximately 2 in. (50 mm) can be accommodated. Samples must also be compatible with a moderate vacuum atmosphere (pressures of 2 Torr or less).
